内容简介：
In the seminar, MEMS/nanotechnology technology and devices developed in Professor Miao’s group will be reported, including piezoelectric material and its applications in MEMS and sensors, silicon micromachining technology, carbon nanotubes for biosensors and through-silicon vias interconnects, microphone, RF switches, etc.
Dr. Miao Jianmin graduated from Tongji University and received the Dipl.-Ing. and Dr.-Ing. degree with distinction from Darmstadt University of Technology, Germany. After his MEMS R&D career in industry, in 1998, he joined Nanyang Technological University, Singapore, as Faculty and Founding Director of the Micromachines (MEMS) Center.
Professor Miao is the author or co-author of near 300 technical papers published in international journals and conference proceedings and the author or coauthor of several books/book chapters. He is the holder of several patents on MEMS. His research interests include MEMS design, technology development, biochip fabrication, and nanotechnology. Dr. Miao has organized and co-organized several MEMS and nanotechnology international conferences and served on the technical committees for international conferences, including the most top conferences IEEE MEMS and TRANSDUCERS. Dr Miao is also very actively involved in the MEMS/Sensor commercialization, served as consultant for many companies including SONY and Maxim Integrated Circuits (US).
